Nano Science and Technology Institute
Nanotech 2004 Vol. 1
Nanotech 2004 Vol. 1
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1

Chapter 9:

Smart MEMS and Sensor Systems

-System Issues in Arrays of Autonomous Intelligent Sensors
 R.M. Newman and E.I. Gaura
 Conventry University, UK
-Simulation of Micromachined Inertial Sensors with Higher-Order Single Loop Sigma-Delta Modulators
 Y. Dong and M. Kraft
 University of Southampton, UK
-Design and Development of an Integrated MEMS Sensor for Real Time Control of Plasma Etching
 B.G. Morris and G.S May
 Georgia Institute of Technology, US
-GEMS: A Revolutionary System for Environmental Monitoring
 J. Manobianco, R.J. Evans, K.S.J. Pister and D.M. Manobianco
 ENSCO, Inc., US
-Resonant Frequency Shift of Torsional Acutators due to Electrostatic Force
 Z. Xiao, Y. Sun, B. Li, S. Lee, K.S. Sidhu, K.K. Chin and K.R. Farmer
 New Jersey Institute of Technology, US
-Electrostatic Tuning of a Micro-Ring Gyroscope
 B.J. Gallacher, J. Hedley, J.S. Burdess, A.J. Harris, A. Rickard and D. King
 Insat University of Newcastle, UK
-Macromodel of Intelligent Sensor Structure with Accelometer
 M. Husak, J. Jakovenko, P. Kulha, J. Novak and V. Janicek
 Czech Technical University in Prague, CZ
-Modeling and Practial Verification of the Ionophore Based Chemically Modified Field Effect Transistor
 M. Daniel, M. Szermer, M. Janicki and A. Napieralski
 DMCS, Technical University of Lodz, PL
-Smart, Intelligent and Cogent Microsensors - Intelligence for Sensors and Sensors for Intelligence
 E. Gaura and R.M. Newman
 Coventry University, UK
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