![]() | Nanotech 2004 Vol. 1
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
Chapter 9: Smart MEMS and Sensor Systems |
| - | System Issues in Arrays of Autonomous Intelligent Sensors |
| R.M. Newman and E.I. Gaura | |
| Conventry University, UK | |
| - | Simulation of Micromachined Inertial Sensors with Higher-Order Single Loop Sigma-Delta Modulators |
| Y. Dong and M. Kraft | |
| University of Southampton, UK | |
| - | Design and Development of an Integrated MEMS Sensor for Real Time Control of Plasma Etching |
| B.G. Morris and G.S May | |
| Georgia Institute of Technology, US | |
| - | GEMS: A Revolutionary System for Environmental Monitoring |
| J. Manobianco, R.J. Evans, K.S.J. Pister and D.M. Manobianco | |
| ENSCO, Inc., US | |
| - | Resonant Frequency Shift of Torsional Acutators due to Electrostatic Force |
| Z. Xiao, Y. Sun, B. Li, S. Lee, K.S. Sidhu, K.K. Chin and K.R. Farmer | |
| New Jersey Institute of Technology, US | |
| - | Electrostatic Tuning of a Micro-Ring Gyroscope |
| B.J. Gallacher, J. Hedley, J.S. Burdess, A.J. Harris, A. Rickard and D. King | |
| Insat University of Newcastle, UK | |
| - | Macromodel of Intelligent Sensor Structure with Accelometer |
| M. Husak, J. Jakovenko, P. Kulha, J. Novak and V. Janicek | |
| Czech Technical University in Prague, CZ | |
| - | Modeling and Practial Verification of the Ionophore Based Chemically Modified Field Effect Transistor |
| M. Daniel, M. Szermer, M. Janicki and A. Napieralski | |
| DMCS, Technical University of Lodz, PL | |
| - | Smart, Intelligent and Cogent Microsensors - Intelligence for Sensors and Sensors for Intelligence |
| E. Gaura and R.M. Newman | |
| Coventry University, UK | |
| ISBN: | 0-9728422-7-6 |
| Pages: | 521 |
| Hardcopy: | $79.95 |
| Order: | Mail/Fax Form |
| Special: | 3 CD Set — 15% off with Free Shipping |
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