Authors: J.V. Clark, D. Garmire, M. Last, J. Demmel and S. Govindjee
Affilation: Berkeley Sensor and Actuator Center, United States
Pages: 402 - 405
Keywords: MEMS modeling, parameter extraction, properties, test structures
We describe simple test structures and practical analysis techniques to measure properties of MEMS devices. Our structures are designed to test many quantities using simple electric probes in a minimal chip area. We analyze differences between the geometry as fabricated and in layout, as well as differences between simulated and actual performance. We validate our electrical measurements using optical tools, and use the measured properties in CAD models to predict the performance of more complex designs.