Cho J-H., Anderson M.J., Richards C.D., Richards R.F., Bahr D.F., Richards C.D., Richards R.F.
Washington State University, US
Keywords: MEMS power, Micro power, PZT membrane
The need for miniaturized power sources for MEMS and microelectronics devices is widely recognized. Recent work by our team at Washington State University has been directed at the design of a micro heat engine in which thermal power is converted to mechanical power through the use of a novel thermodynamic cycle. Mechanical power is then converted into electrical power through the use of a thin-film piezoelectric membrane generator. In this paper we examine the performance of the piezoelectric generator in terms of the quality factor, the electromechanical coupling coefficient, and the efficiency. The effect of design parameters such as membrane size, piezoelectric thickness, and silicon thickness are explored. Efficiencies of 60 to 80 % are possible for relatively modest values of quality factor and coupling coefficient.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: March 7, 2004
Pages: 382 - 385
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-7-6