Nano Science and Technology Institute
Nanotech 2004 Vol. 1
Nanotech 2004 Vol. 1
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1

Chapter 8:

MEMS Design and Application

-A New Method to Design Pressure Sensor Diaphragm
 X. Wang, B. Li, S. Lee, Y. Sun, H.T. Roman, K. Chin and K.R. Farmer
 New Jersey Institute of Technology, US
-Lattice Boltzmann Simulations Comparing Conventional and a Heat Conduction Based Flow-Through PCR Micro-Devices
 T. Mautner
 SPAWAR Systems Center San Diego, US
-Geometrical Effects in Mechanical Characterizing of Microneedle for Biomedical Applications
 P. Aggarwal and C. Johnston
 University of Calgary, CA
-Design and Manufacturing of a Miniaturized 2.45GHz Bulk Acoustic Filter by High Aspect Ratio Etching Process
 C-H Lin, H-R Chen, C-H Du and W. Fang
 National TsingHua University, TW
-A MEMS Tunable Inductor
 I. Zine-El-Abidine, M. Okoniewski and J.G. McRory
 University of Calgary and TRLabs, CA
-Design & Simulation of a Mechanical Amplifier for Inertial Sensing Applications
 M.N. Kham, R. Houlihan and M. Kraft
 Southampton University, UK
-Micromachined Thermal Multimorph Actuators Fabricated by Bulk-etched MUMPs Process
 A. Tuantranont and V.M. Bright
 National Electronics and Computer Technology Center (NECTEC), TH
-Micromachined Piezoresistive Tactile Sensor Array Fabricated by Bulk-etched MUMPs Process
 A. Tuantranont, T. Lomas and V.M. Bright
 National Electronics and Computer Technology Center (NECTEC), TH
-Modelling and Fabrication of Microspring Thermal Actuator
 J.K. Luo, A.J. Flewitt, M. Spearing, N.A. Fleck and W.I. Milne
 University of Cambridge, UK
-The Application of Parametric Excitation to a Micro-Ring Gyroscope
 B.J. Gallacher, J.S. Burdess, A.J. Harris and J. Hedley
 Insat University of Newcastle, UK
-A Nanoscale Composite Material for Enhanced Damage Tolerance in MEMS Applications
 A. Paranjpye, N.C. MacDonald and G.E. Beltz
 University of California, Santa Barbara, US
-Novel Monolithic Micro Droplet Generator
 C.K. Chung, C.J. Lin, C.C. Chen, S.W. Chuang, Y.J. Fang and Y.Z. Hong
 National Cheng Kung University, TW
-A Novel Fabrication Technique of Cylindrical Ion Traps using Low Temperature Co-fired Ceramic Tapes
 A. Chaudhary, F.H.W. van Amerom, S. Bhansali and R.T. Short
 University of South Florida, US
-Micromachined III-V Multimorph Actuator Model and Design using Simulated Annealing (SA)-Based Global Optimization
 A. Ongkodjojo, F.E.H. Tay and R. Akkipeddi
 Institute of Materials Research & Engineering, SG
-Optimized Distributive u-Mixing by Chaotic Multilamination
 F. Schönfeld, K.S. Drese, S. Hardt, V. Hessel and C. Hofmann
 Institut für Mikrotechnik Mainz –(IMM), DE
-Analysis of Micromachined PZT Membranes for MEMS Power
 J.H. Cho, M.J. Anderson, R.F. Richards, D.F. Bahr, and C.D. Richards
 Washington State University, US
-Integrated High Frequency RF Inductors with Nano/micro Patterned Ferromagnetic Cores
 Y. Zhuang, M. Vroubel, B. Rejaei and J.N. Burghartz
 Delft University of Technology, NL
-Two-Regime Hollow PDMS Abbe Prism for u-TAS Applications
 A. Llobera, R. Wilke and S. Büttgenbach
 Institut für Mikrotechnik, DE
-Device Characterization at the Wafer Level via Optical Actuation and Detection
 J. Hedley, J.S. Burdess, A.J. Harris and B.J. Gallacher
 Newcastle University, UK
-A MOEMS Electrothermal Grating
 E.P. Furlani
 Eastman Kodak Research Labs, US
-Practical Techniques for Measuring MEMS Properties
 J.V. Clark, D. Garmire, M. Last, J. Demmel and S. Govindjee
 Berkeley Sensor and Actuator Center, US
-Pumping Capacity and Reliability Study on Silicon-Based Cryogenic Micro Pump
 Y. Zhao, B. Li, D. Ludlow and X. Zhang
 Boston University, US
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