MEMS Design and Application

	Nanotech 2004 Vol. 1 Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1 Chapter 8: MEMS Design and Application
-	A New Method to Design Pressure Sensor Diaphragm
	X. Wang, B. Li, S. Lee, Y. Sun, H.T. Roman, K. Chin and K.R. Farmer
	New Jersey Institute of Technology, US
-	Lattice Boltzmann Simulations Comparing Conventional and a Heat Conduction Based Flow-Through PCR Micro-Devices
	T. Mautner
	SPAWAR Systems Center San Diego, US
-	Geometrical Effects in Mechanical Characterizing of Microneedle for Biomedical Applications
	P. Aggarwal and C. Johnston
	University of Calgary, CA
-	Design and Manufacturing of a Miniaturized 2.45GHz Bulk Acoustic Filter by High Aspect Ratio Etching Process
	C-H Lin, H-R Chen, C-H Du and W. Fang
	National TsingHua University, TW
-	A MEMS Tunable Inductor
	I. Zine-El-Abidine, M. Okoniewski and J.G. McRory
	University of Calgary and TRLabs, CA
-	Design & Simulation of a Mechanical Amplifier for Inertial Sensing Applications
	M.N. Kham, R. Houlihan and M. Kraft
	Southampton University, UK
-	Micromachined Thermal Multimorph Actuators Fabricated by Bulk-etched MUMPs Process
	A. Tuantranont and V.M. Bright
	National Electronics and Computer Technology Center (NECTEC), TH
-	Micromachined Piezoresistive Tactile Sensor Array Fabricated by Bulk-etched MUMPs Process
	A. Tuantranont, T. Lomas and V.M. Bright
	National Electronics and Computer Technology Center (NECTEC), TH
-	Modelling and Fabrication of Microspring Thermal Actuator
	J.K. Luo, A.J. Flewitt, M. Spearing, N.A. Fleck and W.I. Milne
	University of Cambridge, UK
-	The Application of Parametric Excitation to a Micro-Ring Gyroscope
	B.J. Gallacher, J.S. Burdess, A.J. Harris and J. Hedley
	Insat University of Newcastle, UK
-	A Nanoscale Composite Material for Enhanced Damage Tolerance in MEMS Applications
	A. Paranjpye, N.C. MacDonald and G.E. Beltz
	University of California, Santa Barbara, US
-	Novel Monolithic Micro Droplet Generator
	C.K. Chung, C.J. Lin, C.C. Chen, S.W. Chuang, Y.J. Fang and Y.Z. Hong
	National Cheng Kung University, TW
-	A Novel Fabrication Technique of Cylindrical Ion Traps using Low Temperature Co-fired Ceramic Tapes
	A. Chaudhary, F.H.W. van Amerom, S. Bhansali and R.T. Short
	University of South Florida, US
-	Micromachined III-V Multimorph Actuator Model and Design using Simulated Annealing (SA)-Based Global Optimization
	A. Ongkodjojo, F.E.H. Tay and R. Akkipeddi
	Institute of Materials Research & Engineering, SG
-	Optimized Distributive u-Mixing by Chaotic Multilamination
	F. Schönfeld, K.S. Drese, S. Hardt, V. Hessel and C. Hofmann
	Institut für Mikrotechnik Mainz –(IMM), DE
-	Analysis of Micromachined PZT Membranes for MEMS Power
	J.H. Cho, M.J. Anderson, R.F. Richards, D.F. Bahr, and C.D. Richards
	Washington State University, US
-	Integrated High Frequency RF Inductors with Nano/micro Patterned Ferromagnetic Cores
	Y. Zhuang, M. Vroubel, B. Rejaei and J.N. Burghartz
	Delft University of Technology, NL
-	Two-Regime Hollow PDMS Abbe Prism for u-TAS Applications
	A. Llobera, R. Wilke and S. Büttgenbach
	Institut für Mikrotechnik, DE
-	Device Characterization at the Wafer Level via Optical Actuation and Detection
	J. Hedley, J.S. Burdess, A.J. Harris and B.J. Gallacher
	Newcastle University, UK
-	A MOEMS Electrothermal Grating
	E.P. Furlani
	Eastman Kodak Research Labs, US
-	Practical Techniques for Measuring MEMS Properties
	J.V. Clark, D. Garmire, M. Last, J. Demmel and S. Govindjee
	Berkeley Sensor and Actuator Center, US
-	Pumping Capacity and Reliability Study on Silicon-Based Cryogenic Micro Pump
	Y. Zhao, B. Li, D. Ludlow and X. Zhang
	Boston University, US
ISBN:	0-9728422-7-6
Pages:	521
Hardcopy:	$79.95

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