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Nanotech 2003 Vol. 3
Nanotech 2003 Vol. 3
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 3
Chapter 1: Micro and Nano Structuring and Assembly
Low K Carbon Films Deposited in Low Frequency Discharge for Sub-micron Devices
Authors:
A. Kosarev, A. Torres and C. Zuniga
Affilation:
Institut National for Astrophysics, Optics and Electronics, MX
Pages:
29 - 32
Keywords:
materials, semiconductors
Abstract:
An interconnect delay begins to dominate total device delay time and consequently, operation rate at sub-micron (
View paper
ISBN:
0-9728422-2-5
Pages:
560
Hardcopy:
$125.00
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