Nano Science and Technology Institute
Nanotech 2003 Vol. 2
Nanotech 2003 Vol. 2
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2

Chapter 9:

MEMS Design and Application

-Magnetic Diffusion in Nonlinear Micro-Media: A Modified Finite-Difference Time-Domain Approach
 H. Koser, F. Cros, M.G. Allen, J.H. Lang
 Massachusetts Institute of Technology, US
-Mixed-Level Model for Highly Perforated Torsional Actuators Coupling the Mechanical, the Electrostatic and the Fluidic Domain
 R. Sattler, G. Schrag and G. Wachutka
 Institute for Physics of Electrotechnology, DE
-System Level Simulation of Mixed-signal Multi-domain Microsystems with Piecewise Linear Behavioral Models
 J.A. Martínez, T.P. Kurzweg, S.P. Levitan, A.J. Davare, M. Kahrs and D.M. Chiarulli
 University of Pittsburgh, US
-Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer
 H. Xie, G.K. Fedder, Z. Pan and W. Frey
 University of Florida, US
-Tilt-angle Stabilization of Electrostatically Actuated Micromechanical Mirrors
 J.H. Chen, W. Weingar, A. Azarov and R.C. Giles
 Agere Systems, US
-Very Large Scale Integration of MOEMS Mirrors, MEMS Angular Amplifiers and High-voltage, High-density IC Electronics for Photonic Switching
 J. Bryzek, S. Nasiri, A. Flannery, H. Kwon, M. Novack, D. Marx, El Sigari, E. Chen and J. Garate
 Transparent Networks, US
-Symmetry and Symmetry Breaking in Electrostatically Actuated MEMS
 J.A. Pelesko, D.H. Bernstein and J. McCuan
 University of Delaware, US
-Stability of Charge-Controlled Electrostatic Actuators: A general theorem and a novel charge Pull-In extraction numerical scheme
 O. Bochobza-Degani, D. Elata and Y. Nemirovsky
 Electrical Engineering Department, Technion, IL
-Superharmonic Resonance of an Electrically Actuated Resonant Microsensor
 E.M. Abdel-Rahman and A.H. Nayfeh
 Virginia Polytechnic Institute and State University, US
-Air Damping in an Ultra-High-Frequency Disk Resonator
 L.Y. Yap, L.K. Yap and W. Ye
 Georgia Institute of Technology, US
-Monte Carlo Modeling of Micro-Scale Gas Flows
 J. Fan and C. Shen
 Chinese Academy of Sciences, CN
-Size and Strain Rate Effects in Tensil Deformation of Cu Nanowires
 W. Liang and M. Zhou
 Georgia Institute of Technology, US
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