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 | Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Chapter 9: Micro Fluidics |
| | Surface Micromachined Viscous Spiral Pump | | Authors: | M.I. Kilani, P.G. Galambos, Y. Haik and C.J. Chen | | Affilation: | Florida State University, US | | Pages: | 210 - 213 | | Keywords: | pump, spiral | | Abstract: | This paper introduces a new viscous micropump produced using surface micromachining technology. The pump consists of a disk with a spiral protrusion that rotates at a close proximity over a stationary plate. Fluid contained in the spiral channel created by this geometry is subject to a net tangential viscous stress and a positive pressure gradient is established in the direction of flow. The paper describes the design and fluid modeling of the micro spiral pump. |  | View paper | | ISBN: | 0-9728422-0-9 |
| Pages: | 560 |
| Hardcopy: | $125.00 |
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