 | Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Chapter 12: Characterization and Parameter Extraction |
| - | An efficient Adaptive Single-Mode (ASM) Pull-In Extraction Algorithm for Computer Aided Design of Electrostatic MEMS Devices |
| | D. Elata, O. Bochobza-Degani and Y. Nemirovsky |
| | Technion - Israel Institute of Technology, IL |
| - | Nano-bending Method to Identify the Residual Stresses of MEMS Films |
| | J.H. Kim, J.G. Kim, J.H. Hahn, H.Y. Lee, Y.H. Kim |
| | Seoul National University, KR |
| - | Diamond Materials for MEMS and NEMS Structures and Devices |
| | J.E. Butler, T. Feygelson, L. Sekaric, H. Craighead, J. Wang and C.T.-C. Nguyen |
| | Naval Research Laboratory, US |
| - | Frequency Tuning of Silicon Micromechanical Cantilevers by Laser Ablation |
| | B.J. Gallacher, J. Hedley, J.S. Burdess and A.J. Harris |
| | Newcastle University, UK |
| - | Modeling Electrothermal Plastic Deformation |
| | A. Geisberger, N. Sarkar, M. Ellis and G. Skidmore |
| | Zyvex Corporation, US |
| - | Adaption of the 3w-Method for Testing of MEMS |
| | C. Raudzis, F. Schatz and D. Wharam |
| | Corporate Research, Robert Bosch GmbH, DE |
| - | A Modeling Approach based on Laminated Plate Theory to Design Microbeams |
| | S.C. Mantell , E. Longmire and D. Wolters |
| | University of Minnesota, US |
| - | Characterization of Microscale Material Behavior with MEMS Resonators |
| | C.D. White, R. Xu, X. Sun and K. Komvopoulos |
| | University of California Berkeley, US |
| ISBN: | 0-9728422-0-9 |
| Pages: | 560 |
| Special: | 3 CD Set — 15% off with Free Shipping |
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