Characterization and Parameter Extraction

	Nanotech 2003 Vol. 1 Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1 Chapter 12: Characterization and Parameter Extraction
-	An efficient Adaptive Single-Mode (ASM) Pull-In Extraction Algorithm for Computer Aided Design of Electrostatic MEMS Devices
	D. Elata, O. Bochobza-Degani and Y. Nemirovsky
	Technion - Israel Institute of Technology, IL
-	Nano-bending Method to Identify the Residual Stresses of MEMS Films
	J.H. Kim, J.G. Kim, J.H. Hahn, H.Y. Lee, Y.H. Kim
	Seoul National University, KR
-	Diamond Materials for MEMS and NEMS Structures and Devices
	J.E. Butler, T. Feygelson, L. Sekaric, H. Craighead, J. Wang and C.T.-C. Nguyen
	Naval Research Laboratory, US
-	Frequency Tuning of Silicon Micromechanical Cantilevers by Laser Ablation
	B.J. Gallacher, J. Hedley, J.S. Burdess and A.J. Harris
	Newcastle University, UK
-	Modeling Electrothermal Plastic Deformation
	A. Geisberger, N. Sarkar, M. Ellis and G. Skidmore
	Zyvex Corporation, US
-	Adaption of the 3w-Method for Testing of MEMS
	C. Raudzis, F. Schatz and D. Wharam
	Corporate Research, Robert Bosch GmbH, DE
-	A Modeling Approach based on Laminated Plate Theory to Design Microbeams
	S.C. Mantell, E. Longmire and D. Wolters
	University of Minnesota, US
-	Characterization of Microscale Material Behavior with MEMS Resonators
	C.D. White, R. Xu, X. Sun and K. Komvopoulos
	University of California Berkeley, US
ISBN:	0-9728422-0-9
Pages:	560
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