Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1

Characterization and Parameter Extraction Chapter 12

An efficient Adaptive Single-Mode (ASM) Pull-In Extraction Algorithm for Computer Aided Design of Electrostatic MEMS Devices
D. Elata, O. Bochobza-Degani and Y. Nemirovsky
Technion - Israel Institute of Technology, IL

Nano-bending Method to Identify the Residual Stresses of MEMS Films
J.H. Kim, J.G. Kim, J.H. Hahn, H.Y. Lee, Y.H. Kim
Seoul National University, KR

Diamond Materials for MEMS and NEMS Structures and Devices
J.E. Butler, T. Feygelson, L. Sekaric, H. Craighead, J. Wang and C.T.-C. Nguyen
Naval Research Laboratory, US

Frequency Tuning of Silicon Micromechanical Cantilevers by Laser Ablation
B.J. Gallacher, J. Hedley, J.S. Burdess and A.J. Harris
Newcastle University, UK

Modeling Electrothermal Plastic Deformation
A. Geisberger, N. Sarkar, M. Ellis and G. Skidmore
Zyvex Corporation, US

Adaption of the 3w-Method for Testing of MEMS
C. Raudzis, F. Schatz and D. Wharam
Corporate Research, Robert Bosch GmbH, DE

A Modeling Approach based on Laminated Plate Theory to Design Microbeams
S.C. Mantell , E. Longmire and D. Wolters
University of Minnesota, US

Characterization of Microscale Material Behavior with MEMS Resonators
C.D. White, R. Xu, X. Sun and K. Komvopoulos
University of California Berkeley, US


ISBN: 0-9728422-0-9
Pages: 560

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