Low Volume, Large Force (>1mN) and Nanometer Resolution Electrostatic Microactuator for Low Displacement Applications
Authors:
E. Sarajlic, E. Berenschot, G. Krijnen, M. Elwenspoek
Affilation:
University of Twente, NL
Pages:
392 - 395
Keywords:
electrostatic actuators, trench islolation
Abstract:
An electrostatic microactuator suitable for low displacement applications is successfully fabricated and tested. A large force (>1mN) with a controllable nanometer resolution step (
