 | Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Chapter 11: MEMS Design and Application |
| | Design of Performance-Enhanced Fabry-Perot Micro-Cavity Structure With a Novel Single Deeply Corrugated Diaphragm |
| Authors: | W.J. Wang, R.J. Lin and D.G. Guo |
| Affilation: | Nanyang Technological University, SG |
| Pages: | 336 - 339 |
| Keywords: | single deeply corrugated diaphragm, Fabry-Perot, sensor |
| Abstract: | The silicon micromachining technique has been successfully applied to the fabrication of miniature Fabry-Perot sensors. This kind of sensor detects changes in optical path length induced by either a change in the refractive index or a change in physical length of the cavity. In this paper, a novel single deeply corrugated diaphragm (SDCD) structure has been proposed for Fabry-Perot sensor with improved mechanical sensitivity and signal-averaging effect compared to the conventional flat and shallow corrugated diaphragms. |
 | View paper |
| ISBN: | 0-9728422-0-9 |
| Pages: | 560 |
| Hardcopy: | $125.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
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