Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1

MEMS Design and Application Chapter 11

Air Damping in an Ultra-High-Frequency Disk Resonator

Authors: L.Y. Yap, L.K. Yap and W. Ye

Affilation: Georgia Institute of Technology, United States

Pages: 316 - 319

Keywords: air damping, resonator, boundary element method, Navier-Stokes

In this paper we investigate the air damping in a circular disk radially oscillating at 1GHz. First the compressibility effects of air between the disk and the substrate are studied. The pressure perturbation along the radial distance is calculated by analytically solving the compressible Navier-Stokes equation. It has been found that the pressure perturbation is 7-order smaller than the ambient pressure. Therefore compressibility effects are negligible. Next, we simulate the energy dissipation due to the air damping by numerically solving the Stokes equation in air that surrounds the disk, electrodes and substrate. The quality factor is then calculated based on the simulation results. For the studied disk, the quality factor is on the order of 10x7 which indicates viscous damping is not a significant loss mechanism.

ISBN: 0-9728422-0-9
Pages: 560

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