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Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Chapter 11: MEMS Design and Application
Symmetry and Symmetry Breaking in Electrostatically Actuated MEMS
Authors:
J.A. Pelesko, D.H. Bernstein and J. McCuan
Affilation:
University of Delaware, US
Pages:
304 - 307
Keywords:
electrostatic actuation, mathematical model, symmetry breaking
Abstract:
We investigate the symmetry of solutions to the small aspect ratio approximate model of electrostatic actuation. We find that for an annular shaped domain asymmetric solutions may occur.
View paper
ISBN:
0-9728422-0-9
Pages:
560
Hardcopy:
$125.00
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