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 | Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Chapter 11: MEMS Design and Application |
| | Very Large Scale Integration of MOEMS Mirrors, MEMS Angular Amplifiers and High-voltage, High-density IC Electronics for Photonic Switching | | Authors: | J. Bryzek, S. Nasiri, A. Flannery, H. Kwon, M. Novack, D. Marx, El Sigari, E. Chen and J. Garate | | Affilation: | Transparent Networks, US | | Pages: | 300 - 303 | | Keywords: | MEOMS, mirror, array, switch, photonic, MEMS | | Abstract: | The demand for communication bandwidth together with advances in MEMS (micro-electro-mechanical systems) technology has spurred rapid development in the field of MOEMS (micro-optical-electrical mechanical systems). One exciting opportunity is in the area of photonic switching. MOEMS mirror arrays are being used at the core of all-optical cross-connects, enabling switches that are transparent to network protocols, wavelengths, and bandwidth requirements. One critical factor affecting the ability to develop larger port-count switches is the scalability of the MOEMS mirror array. As the number of mirrors in an array grows by x, the number of control lines grows by nx, where n is the number of control signals for each mirror (typically 3 or 4). Passive array technology does not scale well beyond 128-256 mirrors because the density of interconnects and bond pads becomes impractical. To address the need for scalable technology, Transparent Networks has developed a series of enabling technologies to fabricate a highly integrated MOEMS mirror array. The end result is a highly integrated MOEMS mirror array capable of scaling to 4000 or more ports that meets both performance and cost requirements for successful development in the photonic switching market (fig. 5). |  | View paper | | ISBN: | 0-9728422-0-9 |
| Pages: | 560 |
| Hardcopy: | $125.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
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