Nano Science and Technology Institute
Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1

Chapter 11:

MEMS Design and Application

-Magnetic Diffusion in Nonlinear Micro-Media: A Modified Finite-Difference Time-Domain Approach
 H. Koser, F. Cros, M.G. Allen, J.H. Lang
 Massachusetts Institute of Technology, US
-Mixed-Level Model for Highly Perforated Torsional Actuators Coupling the Mechanical, the Electrostatic and the Fluidic Domain
 R. Sattler, G. Schrag and G. Wachutka
 Institute for Physics of Electrotechnology, DE
-System Level Simulation of Mixed-signal Multi-domain Microsystems with Piecewise Linear Behavioral Models
 J.A. Martínez, T.P. Kurzweg, S.P. Levitan, A.J. Davare, M. Kahrs and D.M. Chiarulli
 University of Pittsburgh, US
-Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer
 H. Xie, G.K. Fedder, Z. Pan and W. Frey
 University of Florida, US
-Tilt-angle Stabilization of Electrostatically Actuated Micromechanical Mirrors
 J.H. Chen, W. Weingar, A. Azarov and R.C. Giles
 Agere Systems, US
-Very Large Scale Integration of MOEMS Mirrors, MEMS Angular Amplifiers and High-voltage, High-density IC Electronics for Photonic Switching
 J. Bryzek, S. Nasiri, A. Flannery, H. Kwon, M. Novack, D. Marx, El Sigari, E. Chen and J. Garate
 Transparent Networks, US
-Symmetry and Symmetry Breaking in Electrostatically Actuated MEMS
 J.A. Pelesko, D.H. Bernstein and J. McCuan
 University of Delaware, US
-Stability of Charge-Controlled Electrostatic Actuators: A general theorem and a novel charge Pull-In extraction numerical scheme
 O. Bochobza-Degani, D. Elata and Y. Nemirovsky
 Electrical Engineering Department, Technion, IL
-Superharmonic Resonance of an Electrically Actuated Resonant Microsensor
 E.M. Abdel-Rahman and A.H. Nayfeh
 Virginia Polytechnic Institute and State University, US
-Air Damping in an Ultra-High-Frequency Disk Resonator
 L.Y. Yap, L.K. Yap and W. Ye
 Georgia Institute of Technology, US
-Monte Carlo Modeling of Micro-Scale Gas Flows
 J. Fan and C. Shen
 Chinese Academy of Sciences, CN
-Size and Strain Rate Effects in Tensil Deformation of Cu Nanowires
 W. Liang and M. Zhou
 Georgia Institute of Technology, US
-The Design of a Biaxial Micro Mirror
 X. Zhang, Y. Yao, G. Wang, L. Huang and N. Han
 Intpax Inc., US
-Design and Simulation of the GaAs Micromechanical Thermal Converter for Microwave Transmitted Power Sensor
 J. Jakovenko, M. Husak, E. Burian and T. Lalinsky
 Czech Technical University, CZ
-Design of Performance-Enhanced Fabry-Perot Micro-Cavity Structure With a Novel Single Deeply Corrugated Diaphragm
 W.J. Wang, R.J. Lin and D.G. Guo
 Nanyang Technological University, SG
-Development of a Resonant Magnetometer
 Z. Izham, M.C.L. Ward, K.M. Brunson and P.C. Stevens
 Microsystems Mechanical Engineering, UK
-Modeling and Simulation of A Surface Micromachined Triaxial Accelerometer
 L. Jiang, W.N. Carr
 New Jersey Institute of Technology, US
-The Analysis of the Influence of the Auxiliary Components on FBAR Response
 T.K. Shing, C.H. Tai, Y.D. Lee and C.C. Tien
 ITRI, TW
-Analysis of Temperature Effect on Diaphragm Resonant Sensors
 W. Faris
 Virginia Polytechnic and State Univeristy, US
-A Novel Structure for PZT-Based Piezoelectric Microphone
 H.J. Zhao, T.L. Ren, J.S. Liu, L.T. Liu, Z.J. Li
 Tsinghua University, CN
-Modeling and Optimal Design of High Sensitivity Piezoresistive Microcantilevers for Biosensing Applications
 M. Yang, X. Zhang and C.S. Ozkan
 University of California Riverside, US
-Mechanical Damping due to Interface Motion in Micro-Resonators
 D.N. Pawaskar and R. Phillips
 California Institute of Technology, US
-A New Method of Excluding The External Acceleration’s Effect in a Micromachined Magnetometer for Navigation Systems
 J-M Cho, K.S. Kim, S.D. An, H.J. Park and G. Hahm
 Samsung Electromechanics Co., LTD., KP
-New Micro Hydro Power Device
 S. Pobering, N. Schwesinger,
 Münich University of Technology, DE
-Optimization of Thermally Actuated Bimorph Cantilevers for Maximum Deflection
 W. Peng, Z. Xiao and K.R. Farmer
 New Jersey Institute of Technology, US
-Simulation of a Diamond-Based Bistable Thermal Microswitch
 P. Schmid, F.J. Hernandez-Guillen and E. Kohn
 University of Ulm, DE
-Modeling the Electro-Thermal Response of Thermally Isolated Micromachined Distributed Structures
 E. Socher, O. Bochobza-Degani, D. Elata and Y. Nemirovsky
 Israel Institute of Technology, IL
-Coupling Spring Design and Insertion Loss Minimization of Second Order MicroElectroMechanical Filters
 M. Naseer, M. Parlak, T. Bechteler, Y. Gurbuz
 Sabanci University, TR
-Low Volume, Large Force (>1mN) and Nanometer Resolution Electrostatic Microactuator for Low Displacement Applications
 E. Sarajlic, E. Berenschot, G. Krijnen, M. Elwenspoek
 University of Twente, NL
-High Resolution Silicon Accelerometer Using Eutectic Bonding
 Y. Kwang, J.C. Yeon, Y.H. Kim, S.W. Rhee and S.H. Oh
 Seoul National University, KR
-FEM Assisted Design of Novel Electrothermal Actuators
 S. Deladi, G. Krijnen and M. Elwenspoek
 University of Twente, NL
-Operation and Testing of a Micro Heat Engine
 S. Whalen, R. Richards, D. Bahr and C. Richards
 Washington State University, US
-Design and Simulation of a MicroElectroMechanical Resonator Oscillator
 M. Parlak, M. Naseer and Y. Gurbuz
 Sabanci University, TR
-Coupled Substrate-resonator-electrostatic Simulation and Validation fo High-Q MEMS Resonator Performance
 Y.H. Park and K.C. Park
 University of Colorado at Boulder, US
-High-fidelity MEMS Switch Model
 Y.H. Park,Y. Miyazaki and K.C. Park
 University of Colorado at Boulder, US
-Dynamically Amplified Rate Integrating Gyroscopes
 C. Painter and A. Shkel
 University of California, Irvine, US
-A Nanoscopic Rotary Electrostatic Motor
 J.H. Wright, D.P. Sheehan and T.F. Schubert Jr.
 University of San Diego, US
-MEMS Gyroscopes with Structurally Decoupled 2-DOF Drive and Sense Mode Oscillators
 C. Acar and A.M. Shkel
 University of California, Irvine, US
-Simulation of Cantilever Beam Micro-switch Pull-in and Collapse Voltages
 J.R. Reid and L.A. Starman
 Air Force Research Laboratory, US
-Development of the Multi-pixel X-ray Microcalorimeters
 H. Kudo, T. Nakamura, T. Arakawa, S. Ohtsuka, T. Izumi, S. Shoji, H. Sato, H. Kobayashi, K. Mori, T. Homma, T. Osaka, K. Mitsuda, N.Y. Yamasaki, R. Fujimoto, N. Iyomoto, T. Oshima, K. Futamoto, Y. Takei, T. Ichitsubo, T. Fujimori, Y. Ishisaki, U. Morita, T. Ohashi, Y. Kuroda, M. Onishi and K. Otake
 Waseda University, JP
-Extensions of Spring Model Approach for Continuum-based Topology Optimization of Compliant Mechanisms.
 M. Sharma and T. Udeshi
 Zyvex Corporation, US
-A Vertical MOSFET for Charge Sensing in the Convex Corner of Si Microchannels
 G. Lim, C-S Park, H-K Lyu, D-S Kim, J-K Shin, P. Choi and M. Lee
 Kyungpook National University, KP
-Modelling and Simulation of Mechanical, Thermal and Electrical Behaviour of Si Cantilever with Implanted Strain Gauge
 M. Husak, J. Jakovenko, P. Kulha and Z. Vborn
 Czech Technical University in Prague, CZ
-MEMS Technologies for Communications
 C.T.-C. Nguyen
 DARPA/MTO, US
-Nanoscience and Nanotechnology:Two New Exciting Fields for Future Display Applications
 Z. Yaniv
 Applied Nanotech, Inc., US
-NanoMuscle at the Nano-Frontier
 H. Nash, R. MacGregor, P. Von Behrens, A. Szilagyi
 NanoMuscle, US
ISBN:0-9728422-0-9
Pages:560
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