Electro-Mechanical Transducer for MEMS Analysis in ANSYS
Authors:
M. Gyimesi and D. Ostergaard
Affilation:
ANSYS, Inc., U.S.A.
Pages:
270 - 273
Keywords:
micro electro-mechanical system MEMS, finite element analysis FEA, transducer, capacitor, strongly coupled simulation
Abstract:
The paper introduces an electro-mechanical transducer finite element (EMT) for the strongly coupled simulation of micro electro-mechanical system (MEMS) devices in the commercial finite element analysis (FEA) package ANSYS.
