Modeling a Piezoelectric Actuator Using a Transformer Equivalent Circuit
Authors:
F. Oms-Elisabelar, C. Bergaud, L. Nicu and A. Martinez
Affilation:
CNRS, France
Pages:
249 - 253
Keywords:
equivalent circuit, global simulation, piezoelectric actuator, MEMS
Abstract:
In this paper, we describe both the static and dynamic behaviors of an AFM-like piezoelectric actuator using a transformer equivalent circuit in which both the electrical and mechanical portions are represented by electrical equivalencies. The equivalent circuit is develped starting grom electromechanical transduction principles and included in a commercial SPICE package. ANalytical and simulated results are compared and found in good agreement both for static and dynamic analysis.
