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 | MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 6: Characterization, Parameter Extraction, Calibration |
| | MEMS/MST Model Verification and Materials Parameter Extraction Using MEMSPEC-2000 | | Authors: | A. Gutierrez, S. Aceto, M. Simkulet, D. Patti, M. Liendhard, T. Krawczyk and A. Lundgren | | Affilation: | InterScience, Inc, U.S.A. | | Pages: | 210 - 213 | | Keywords: | model verification, materials parameter extraction, MEMSPEC-2000, MEMS, MST | | Abstract: | We describe the current status of the MEMSPEC-2000 MEMS/MST characterization system. This system has been designed to provide automated multi-domain measurements of a wide range of MEMS/MST devices. The system is capable of high resolution surface profiling across the whole surface of a wafer. It can also be used to study motion of micro devices, both in-plane and out-of-plane. The system uses non-contact laser probing and automated navigation across a wafer. The system is at present fully functional and being benchmarked against a wide variety of test devices. |  | View paper | | ISBN: | 0-9666135-4-6 |
| Pages: | 697 |
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