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 | MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 6: Characterization, Parameter Extraction, Calibration |
| | SPDC: An Automatic Generator of Input Data for Process Simulators from Process Flow Data for Manufacturing | | Authors: | T. Tatsumi, H. Ansai, M. Mukai and Y. Komatsu | | Affilation: | Sony Corporation, Japan | | Pages: | 202 - 205 | | Keywords: | process simulation, data conversion, expert system | | Abstract: | We have developed a system called SPDC, which is designed to automatically generate input data for simulation from process ow data for manufacturing. As this conversion is not one-to-one translation, SPDC prepares databased knowledge called "scenario" from both device and simulation expert engineers. This database is utilized to analyze process ow data for manufacturing and then to synthesize input data for simulation. SPDC enabled device engineers unfamiliar to simulation utilization to prepare input data reducing more than three days work to less than a few minutes work. The quality of the synthesized input data is perfectly comparable to the one written by expert simulation users. |  | View paper | | ISBN: | 0-9666135-4-6 |
| Pages: | 697 |
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