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 | MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 6: Characterization, Parameter Extraction, Calibration |
| | Optimal Design of Computer Experiments for the Generation of Microsystem Macromodels Using IMSET and Non-Parametric Fitting | | Authors: | S.B. Crary, P. Cousseau, D. Armstrong, D.M. Woodcock, O. Dubochet, P. Lerch and Ph. Renaud | | Affilation: | University of Michigan, U.S.A. | | Pages: | 184 - 189 | | Keywords: | MEMS, I-optimality, I-OPT, silicon flow sensor, design of experiments | | Abstract: | We present a new and unique software program, IMSET, capable of finding optimal designs for computer experiments. A finite-element simulation of a micro-machined flow sensor was used to illustrate macromodel generation and to compare the quality of the IMSET design with other approaches. Coupled with an appropriate analysis, IMSET provides a highly efficient means of non-parametric macromodel generation. IMSET is available on the World-Wide Web. |  | View paper | | ISBN: | 0-9666135-4-6 |
| Pages: | 697 |
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