Papers:
Acceleration of Inductance Extraction by Means of the Monte Carlo Method
With increasing signal frequencies inductive effects of metallic interconnections in all kinds of packages become more and more important for the electrical behavior of a circuit. During the design process it is therefore of interest [...]
Accurate Inductance Extraction with Permeable Materials Using Qualocation
In this paper we present a more accurate method for solving a frequency-dependent inductance of 3-D structures that contains permeable materials. The extracted inductance using the new method is much more accurate than when using [...]
Reduced-Order Modeling of Lorentz Force Actuation with Modal Basis Functions
We present a method for generating dynamic reduced-order models for Lorentz force actuation in microelectromechanical systems (MEMS). These models, derived from a set of meshed simulations, are analytical representations of the magnetic co-energy of a [...]
Capacitance Extraction from Complex 3D Interconnect Structures
Cartwright D., Csanak G., George D., Walker R., Kuprat A., Dengi A., Grobman W., Los Alamos National Laboratory, US
A new tool has been developed for calculating the capacitance matrix for complex 3D interconnect structures involving multiple layers of irregularly shaped interconnect, imbedded in different dielectric materials. This method utilizes a new 3D adaptive [...]
A Technique for Extraction of Macro-Models in System Level Simulation of Inertial Electro-Mechanical Micro-Systems
Zaman M.H., Bart S.F., Rabinovich V.L., Ghaddar C.K., Tchertkov I., Gilbert J.R., Microcosm Technologies, Inc., US
This paper presents a comprehensive CAD environment for MEMS/MST design. The design flow includes MEMS mechanical schematic entry, parameterized cell layout generation, LVS style error checking, lumped parameter macro-model generation, and system level modeling of [...]
A Wide Frequency Range Surface Integral Formulation for 3-D Inductance and Resistance Extraction
A new surface integral formulation and discretization approach for computing the magnetoquasistatic impedance of general conductors is described. The key advantage of the formulation is that it correctly predicts the resistance and inductance over the [...]
Simple ADPL Implementation of a 3D FEM Simulator for Mutual Capacitances of Arbitrarily Shaped Objects Like Interconnects
This paper describes the implementation of an ANSYS Parametric Design Language (APDF) macro called CACACO for the computation of capacitance matrixes of arbitrarily shaped 3D objects in arbitrarily distributed dielectrics via the conservation of field [...]
Extraction of Compact Model Parameters for ULSI MOSFETs Using a Genetic Algorithm
Extracting an optimal set of parameter values for an FET device model is a complex problem. The final model must not only describe the performance of a set of hardware to an acceptable level of [...]
Modelling Calibration and Validation of Contributions to Stress in the STI Process Sequence
The mathematics and mechanics of the Shallow Trench Isolation process are described. The diffusion reaction problem is posed in terms of fundamental mass balance laws. Finite strain kinematics is invoked to model the large expansion [...]
Optimal Design of Computer Experiments for the Generation of Microsystem Macromodels Using IMSET and Non-Parametric Fitting
Crary S.B., Cousseau P., Armstrong D., Woodcock D.M., Dubochet O., Lerch P., Renaud Ph., University of Michigan, US
We present a new and unique software program, IMSET, capable of finding optimal designs for computer experiments. A finite-element simulation of a micro-machined flow sensor was used to illustrate macromodel generation and to compare the [...]
Parameter Extraction for a Microwave Micromachined Switch
This paper details new parameter extraction methods for microwave micromachined switches. Speciffically new methods for extracting switch turn-on and turn-off transient behavior and switch electromagnetic behavior are discussed. The accuracy of these methods are verified [...]
Complete Characterization of Electrostatically-Actuated Beams Including Effects of Multiple Discontinuities and Buckling
The entire process of calibrating an electromechanical simulator ñ identifying relevant parameters, designing and measuring test structures, extracting parameters using detailed electromechanical simulations, and extrapolating the behavior of an actual device ñ is presented. The [...]
Numerical and Analytical Modeling of the Piezoelectric Transformer and Experimental Verification
In this paper, to approach the modeling aspect, we have selected a Rosen-type structure of piezo-electric transformer which, for us, seems very interesting from an educational point of view. Two approaches will be presented, (i) [...]
SPDC: An Automatic Generator of Input Data for Process Simulators from Process Flow Data for Manufacturing
We have developed a system called SPDC, which is designed to automatically generate input data for simulation from process ow data for manufacturing. As this conversion is not one-to-one translation, SPDC prepares databased knowledge called [...]
IMAP: Interferometry for Material Property Measurement in MEMS
An interferometric technique has been developed for non-destructive, high-confidence, in-si tu determination of material properties in MEMS. By using interferometry to measure the full deflection curves of beams pulled toward the substrate under electrostatic loads, [...]
MEMS/MST Model Verification and Materials Parameter Extraction Using MEMSPEC-2000
Gutierrez A., Aceto S., Simkulet M., Patti D., Liendhard M., Krawczyk T., Lundgren A., InterScience, Inc, US
We describe the current status of the MEMSPEC-2000 MEMS/MST characterization system. This system has been designed to provide automated multi-domain measurements of a wide range of MEMS/MST devices. The system is capable of high resolution [...]
HEMT Optimization by Advanced RSM Models
In this paper, the optimization of heterostructure devices using the Design of Experiments concept and advanced Response Surface Models is presented. As an example, the structural optimization of a pseudomorphic Al0.2Ga0.8As/In0.2Ga0.8As/GaAs pulse doped HEMT is [...]
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-4-6