Characterization, Parameter Extraction, Calibration

	MSM 99 Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems Chapter 6: Characterization, Parameter Extraction, Calibration
-	Acceleration of Inductance Extraction by Means of the Monte Carlo Method
	G. Leonhardt and W. Fichtner
	Swiss Federal Institute of Technology, Switzerland
-	Accurate Inductance Extraction with Permeable Materials Using Qualocation
	Y. Massoud, J. Wang and J.K. White
	Massachusetts Institute of Technology, U.S.A.
-	Reduced-Order Modeling of Lorentz Force Actuation with Modal Basis Functions
	M. Varghese, V.L. Rabinovich and S.D. Senturia
	Massachusetts Institute of Technology, U.S.A.
-	Capacitance Extraction from Complex 3D Interconnect Structures
	D. Cartwright, G. Csanak, D. George, R. Walker, A. Kuprat, A. Dengi and W. Grobman
	Los Alamos National Laboratory, U.S.A.
-	A Technique for Extraction of Macro-Models in System Level Simulation of Inertial Electro-Mechanical Micro-Systems
	M.H. Zaman, S.F. Bart, V.L. Rabinovich, C.K. Ghaddar, I. Tchertkov and J.R. Gilbert
	Microcosm Technologies, Inc., U.S.A.
-	A Wide Frequency Range Surface Integral Formulation for 3-D Inductance and Resistance Extraction
	J. Wang, J. Tausch and J.K. White
	Massachusetts Institute of Technology, U.S.A.
-	Simple ADPL Implementation of a 3D FEM Simulator for Mutual Capacitances of Arbitrarily Shaped Objects Like Interconnects
	A. Hieke
	Siemens Microelectronics, U.S.A.
-	Extraction of Compact Model Parameters for ULSI MOSFETs Using a Genetic Algorithm
	J. Watts, C. Bittner, D. Heaberlin and J. Hoffman
	IBM Microelectronics Division, U.S.A.
-	Modelling Calibration and Validation of Contributions to Stress in the STI Process Sequence
	K. Garikipati, V.S. Rao, M.Y. Hao, E. Ibok, I. De Wolf and R.W. Dutton
	Stanford University, U.S.A.
-	Optimal Design of Computer Experiments for the Generation of Microsystem Macromodels Using IMSET and Non-Parametric Fitting
	S.B. Crary, P. Cousseau, D. Armstrong, D.M. Woodcock, O. Dubochet, P. Lerch and Ph. Renaud
	University of Michigan, U.S.A.
-	Parameter Extraction for a Microwave Micromachined Switch
	J. Chen, K.M. Coperich, S-M Kang and J. Schutt-Aine
	University of Illinois at Urbana-Champaign, U.S.A.
-	Complete Characterization of Electrostatically-Actuated Beams Including Effects of Multiple Discontinuities and Buckling
	E.K. Chan, K. Garikipati and R.W. Dutton
	Stanford University, U.S.A.
-	Numerical and Analytical Modeling of the Piezoelectric Transformer and Experimental Verification
	S. Hallaert, E. Sarraute and B. Le Pioufle
	URA CNRS 1375, France
-	SPDC: An Automatic Generator of Input Data for Process Simulators from Process Flow Data for Manufacturing
	T. Tatsumi, H. Ansai, M. Mukai and Y. Komatsu
	Sony Corporation, Japan
-	IMAP: Interferometry for Material Property Measurement in MEMS
	B.D. Jensen, M.P. de Boer and S.L. Miller
	Sandia National Laboratory, U.S.A.
-	MEMS/MST Model Verification and Materials Parameter Extraction Using MEMSPEC-2000
	A. Gutierrez, S. Aceto, M. Simkulet, D. Patti, M. Liendhard, T. Krawczyk and A. Lundgren
	InterScience, Inc, U.S.A.
-	HEMT Optimization by Advanced RSM Models
	M.D. Profirescu, G. Dima, B. Govoreanu and O. Mitrea
	University Politehnica of Bucharest, Romania
ISBN:	0-9666135-4-6
Pages:	697
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