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 | MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 5: System-Level Modeling |
| | MEMS Functional Validation Using the Configuration Space Approach to Simulation and Analysis | | Authors: | E. Sacks and J. Allen | | Affilation: | Purdue University, U.S.A. | | Pages: | 136 - 138 | | Keywords: | MEMS, micro-mechanical design, configuration space, Summit | | Abstract: | We have developed an interactive computer-aided design program that supports mechanical design of devices fabri-cated in surface micro-machining processes. The program automates kinematic analysis via a novel configuration space computation code, performs real-time simulation, and sup-ports functional parametric design. Designers can visualize system function under a range of operating conditions, can find and correct design flaws, and can optimize performance. We used the program to detect and correct a design flaw in a micro-mechanical indexing mechanism fabricated at Sandia with the SUMMiT process. |  | View paper | | ISBN: | 0-9666135-4-6 |
| Pages: | 697 |
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