Nano Science and Technology Institute
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Chapter 5:

System-Level Modeling

-Modeling of Electrostatic MEMS Components
 G. Lorenz, R. Neul and S. Dickmann
 Robert Bosch GmbH, Germany
-A Common Basis for Mixed-Technology Micro-System Modeling
 J.P. Hanna and R.G. Hillman
 Air Force Research Laboratory, U.S.A.
-MEMS Functional Validation Using the Configuration Space Approach to Simulation and Analysis
 E. Sacks and J. Allen
 Purdue University, U.S.A.
-Energy-Based Characterization of Microelectromechanical Systems (MEMS) and Component Modeling Using VHDL-AMS
 A. Dewey, H. Dussault, J.P. Hanna, E. Christen, G.K. Fedder, B.F. Romanowicz and M.A. Maher
 Duke University, U.S.A.
-MEMS Component Extraction
 B. Baidya, S.K. Gupta and T. Mukherjee
 Carnegie Mellon University, U.S.A.
ISBN:0-9666135-4-6
Pages:697
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