![]() | MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 5: System-Level Modeling |
| - | Modeling of Electrostatic MEMS Components |
| G. Lorenz, R. Neul and S. Dickmann | |
| Robert Bosch GmbH, DE | |
| - | A Common Basis for Mixed-Technology Micro-System Modeling |
| J.P. Hanna and R.G. Hillman | |
| Air Force Research Laboratory, US | |
| - | MEMS Functional Validation Using the Configuration Space Approach to Simulation and Analysis |
| E. Sacks and J. Allen | |
| Purdue University, US | |
| - | Energy-Based Characterization of Microelectromechanical Systems (MEMS) and Component Modeling Using VHDL-AMS |
| A. Dewey, H. Dussault, J.P. Hanna, E. Christen, G.K. Fedder, B.F. Romanowicz and M.A. Maher | |
| Duke University, US | |
| - | MEMS Component Extraction |
| B. Baidya, S.K. Gupta and T. Mukherjee | |
| Carnegie Mellon University, US | |
| ISBN: | 0-9666135-4-6 |
| Pages: | 697 |
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