 | MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 4: Process Modeling |
| - | A Program for Modeling of Technological Routes of VLSI Fabrication - ProMIC-T |
| | V. Tesluk and O. Korbetskyy |
| | Lvov Polytechnic, UA |
| - | Simulation Support for Silicon-Bulk Microsystems Demonstrated in an Inclination Sensor Development |
| | D. Zielke |
| | GEMAC mbH, DE |
| - | Laser Induced Surface Modification of Ceramic Substrates for Thermal and Electric Lines in Microsystems: Modeling Compared to Experiment |
| | H. Gruhn, R. Heidinger, M. Rohde, S. Rüdinger, J. Schneider and K.-H. Zum Gahr |
| | Forschungszentrum Karlsruhe, DE |
| - | Nitrous Oxide-Based Progressive Silicon Oxynitridation in Furnaces of Different Dimensions |
| | S.S. Dang and C.G. Takoudis |
| | University of Illinois - Chicago, US |
| - | Mask-Layout Synthesis Through an Evolutionary Algorithm |
| | H. Li and E.K. Antonsson |
| | California Institute of Technology, US |
| - | Surface Reconstruction of Etched Contours |
| | C.-Y. Lee and E.K. Antonsson |
| | California Institute of Technology, US |
| - | A Novel Method to Utilize Existing TCAD Tools to Build Accurate Geometry Required for MEMS Simulation |
| | N.M. Wilson, S. Liang, P.M. Pinsky and R.W. Dutton |
| | Stanford University, US |
| - | Design of Compensation Structures for Anisotropic Etching |
| | M.K. Long, J.W. Burdick and E.K. Antonsson |
| | California Institute of Technology, US |
| ISBN: | 0-9666135-4-6 |
| Pages: | 697 |
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