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 | MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 19: Applications: Electromagnetics, Optics, Imaging |
| | CAD for Opto-Electronic Microsystems | | Authors: | T.P. Kurzweg, S.P. Levitan, P.J. Marchand, K.R. Prough and D.M. Chiarulli | | Affilation: | University of Pittsburgh, U.S.A. | | Pages: | 687 - 690 | | Keywords: | MEMS-CAD, optical MEMS, MOEMS, micro-optics | | Abstract: | The use of MEMs technology has enabled the fabrica-tion of micro-optical and micro-electro-mechanical systems on a common substrate. This has led to new challenges in computer aided design of optical micro-electro-mechanical systems. We have extended our free-space opto-electronic system CAD tool, Chatoyant, to meet the needs of optical MEMS designers. This paper presents new analysis tech-niques which extend our tool to support optical MEM sys-tem design. We demonstrate these extensions with the analysis of a 1x2 micro-optical MEM interferometer switch. |  | View paper | | ISBN: | 0-9666135-4-6 |
| Pages: | 697 |
| Hardcopy: | $100.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
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