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 | MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 18: Applications: Micropumps, Heaters, Coolers |
| | Development of CAD Model for MEMS Micropumps | | Authors: | M. Arik, S.M. Zurn, A. Bar-Cohen, Y. Nam, D. Markus and D. Polla | | Affilation: | Univeristy of Minnesota, U.S.A. | | Pages: | 651 - 654 | | Keywords: | CAD model, Finite element analyses, PZT cantilever beam, Atomic force microscope | | Abstract: | This paper describes development of a Computer Aided Design Model for MicroElectroMechanical Systems. Finite Element Analyses have been completed successfully to understand the physical nature of the sample MEMS devices. Numerical results have been supported by analytical calculations in terms of the displacement, impedance, modular and harmonic analyses. A set of piezoelectrically actuated cantilever beams have been fabricated at the Microtechnology Laboratory of the University of Minnesota. Numerical results well compared with the experimental findings. |  | View paper | | ISBN: | 0-9666135-4-6 |
| Pages: | 697 |
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