A New Analytical Solution for Diaphragm Deflection and its Application to a Surface-Micromachined Pressure Sensor
Authors:
W.P. Eaton, F. Bitsie, J.H. Smith, D.W. Plummer
Affilation:
Sandia National Laboratory, U.S.A.
Pages:
640 - 643
Keywords:
MEMS, microsystems, pressure sensor, diaphragm
Abstract:
An analytical solution for large deflections of a clamped circular diaphragm with built-in stress is presented. The solution is directly applicable to micromachined pressure sensors. The solution is compared to finite element analysis results and experimental data from a surface-micromachined pressure sensor.
