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 | MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 17: Applications: Pressure, Actuation, Navigation |
| | Modeling Approach for CVD-Diamond Based Mechanical Structures | | Authors: | P. Schmid, M. Adamschik, S. Ertl, P. Gluche and E. Kohn | | Affilation: | University of Ulm, Germany | | Pages: | 636 - 639 | | Keywords: | diamond, CVD, stress | | Abstract: | In this study, mechanical structures based on polycrystalline diamond films grown on silicon substrate are investigated. In contrast to all-silicon MEMS, additional problems arise due to the unusual properties of diamond. These effects are investigated by modeling diamond-based micro-mechanical devices and comparing the results to measurements on processed devices. All simulations were carried out using the standard simulation tool ANSYS and measured modeling parameters. |  | View paper | | ISBN: | 0-9666135-4-6 |
| Pages: | 697 |
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