| |
 | MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 13: Metallization Modeling |
| | Modeling Facet Growth of Cu Thin Films | | Authors: | Z. Wang, Y. Li and J.B. Adams | | Affilation: | Arizona State University, U.S.A. | | Pages: | 455 - 458 | | Keywords: | kinetic lattice Monte Carlo simulation, thin film growth, Cu | | Abstract: | We present a Kinetic Lattice Monte Carlo (KLMC) model, which describes deposition, surface self-diffusion, nucleation, and film growth on fcc metal substrates. The activation energies for diffusion are calculated using embedded-atom method (EAM). Using this model, we determine the relative growth rates of (100), (110) and (111) facets as a function of substrate temperature, deposition rate and facet size. |  | View paper | | ISBN: | 0-9666135-4-6 |
| Pages: | 697 |
| Special: | 3 CD Set — 15% off with Free Shipping |
| Up | |
|
| Upcoming Events |
 |
 |
 |
 |
| nanoPRwire™ |
 |
| News Headlines |
 |
|
|
| |
| |
|
| | |
| |
|
|
