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 | MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Chapter 12: Semiconductor Device Modeling |
| | Self Aligned Gate JFETs for Smart MEMS | | Authors: | S. Amon, D. Vrtacnik, D. Resnik, D. Krizaj, U. Aljancic and A. Levstek | | Affilation: | University of Ljubljana, Slovenia | | Pages: | 435 - 438 | | Keywords: | JFET, self aligned gate, device isolation, smart sensors, MEMS | | Abstract: | Self Aligned Gate JFET (SJFET) devices and circuits are reported. The problem of electrical isolation between devices on the same chip is realized through Self Aligned Gate approach, enabling the application of standard bipolar discrete device technology (no epitaxy etc.). SJFET structures and circuits are analyzed by 2D numerical device simulation. SJFET differential amplifier circuit modeling is reviewed as an example. On the basis of modeling, test SJFET structures were designed and fabricated. Measurements on test SJFET structures reveale reasonable agreement with modeling. |  | View paper | | ISBN: | 0-9666135-4-6 |
| Pages: | 697 |
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