Ramaswamy D., Aluru N.R., White J.K.
Massachusetts Institute of Technology, US
Keywords: coupled, electromechanical, MEMS, rigid, simulation
In this paper we describe both how to extract rigid bodies given an input file of elements, and how to efficiently construct and solve the rigid-elastic system of equations. Results are given to demonstrate that on a typical comb drive problem, our efficiently implemented mixed rigid-elastic simulator is more than 300 times faster than a purely elastic simulator. TVe also demonstrate that the mixed-regime simulator can be used as part of a coupled-domain simulator to perform 3-D electromechanical analysis of an entire comb drive in under ten minutes.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Pages: 304 - 307
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-96661-35-0-3