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 | MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Chapter 13: Applications: Optics, Electromagnetics |
| | Opto-Electro-Mechanical model for MOEMS | | Authors: | G. Jacquemod, K. Vuorinen, F. Gaffiot, A. Spisser, C. Seassal, J-L Leclercq, P Rojo-Romeo, P. Viktorovitch, J-P Laine, R. Ledantec and T. Benyattou | | Affilation: | Ecole Centrale de Lyon, France | | Pages: | 608 - 613 | | Keywords: | MOEMS, optical filter, Hardware Descripffon Languages, behavioral modeling, WDM | | Abstract: | A highly selective and widely tunable optical filter based on MOEMS technology at 1.55 gm using a Fabry-Perot resonator with micromachined InP-air gap distributed Bragg reflectors has been designed and fabricated in our laboratory. The minimum resonance Full Width at Half Maximum (FWHM), as measured by micro-reflecffvity experiments, is close to 0.4 nm (around 1.55 1lm) and the continuous tuning range is around 60 nm for a bias voltage of 14 V. In order to study the global characterisffcs of this device, an opto-electro-mechanical behavioral model has been developed. The model, written in VHDL-AMS-like Hardware Description Language, allows a combined simulaffon of opffcal, electrical and mechanical behavior of the tunable opffcal filter in a mixedsignal electronics design framework. Moreover, the use of Hardware Descripffon Language allows an integration of the model in a system simulation context. |  | View paper | | ISBN: | 0-96661-35-0-3 |
| Pages: | 678 |
| Hardcopy: | $100.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
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