Székely V., Rencz M., Páhi A., Poppe A., Hajder Sz.
Technical University of Budapest, HU
Keywords: MEMS, thermal simulation tools
Two different field solver tools have been developed in order ro facilitate fast thermal and electro-static simulation of microsystem elements. The pSTHERMANAL program is capable for the fast steadystate and dynamic simulation of suspended multilayered microsystem structures. The 2D-SUNRED program is the first version of a generalfield solver based on an original method, the successive node reduction. SUNRED offers a very fast and accurate substitute of FEM programs for the solution of the Poisson equation.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Pages: 463 - 468
Industry sector: Sensors, MEMS, Electronics
Topic: Chemical, Physical & Bio-Sensors
ISBN: 0-96661-35-0-3