Nano Science and Technology Institute
MSM 98
MSM 98
Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems

Chapter 1:

Plenary Lectures

-Challenges in Process Modeling for MEMS
 R.W. Dutton, E.K. Chan, N.W. Wilson, Z-K Hsiau and S. Shen
 Stanford University, US
-CMOS MEMS and their Simulation
 J.G. Korvink, M. Emmenegger, S. Taschini and H. Baltes
 ETH Z├╝rich, CH
-Micromanipulation and Robotic Technology
 T. Fukuda, F. Arai
 Univerisity of Nagoya, JP
-Simulation and Modeling of Optoelectronic Devices, Circuits and Systems
 J.J. Morikuni, P.V. Mena, A.V. Harton, K.W. Wyatt
 Motorola, US
-A Multi-disciplinary Design Flow for Designing Embedded System on Silicon
 I. Bolsens
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