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 | Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Chapter 9: Nanoscale Modeling of Front-End Processing in Silicon |
| | Nanoworld Semiconductor Industry - State and Future Challenges of Technology Computer Aided Design | | Authors: | H. Puchner | | Affilation: | Cypress Semiconductor, USA | | Pages: | 458 - 461 | | Keywords: | high-k, plasma, nitridation, reactor-scale, feature-scale, kinetic Monte Carlo | | Abstract: | Several application examples of nanoscale techniques used to influence or enhance the understanding of material properties as well as processing behavior are presented. We will also present a review of first principle density functional theory calculations used to investigate the scaling trends of high-k gate dielectrics. Since conventional as well as high-k dielectrics may still require a strong diffusion barrier against boron penetration we will present ab-initio quantum chemical calculations for the diffusion of boron within a thin gate oxide layer. Plasma-nitridation can be applied to alter the diffusion behavior of boron inside the gate oxide dielectric and to completely block boron penetration. We will present a detailed view on the nitridation mechanism and a combination of reactor-feature scale simulation in combination with Monte Carlo implantation simulations to describe the nitridatio process. Finally, kinetic Monte Carlo applications are presented for diffusion processes. |  | View paper | | ISBN: | 0-9708275-7-1 |
| Pages: | 764 |
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