Triangle Transducer for Micro Electro Mechanical Systems (MEMS) Simulation in ANSYS Finite Element Program
Authors:
M. Gyimesi, D. Ostergaard and I. Avdeev
Affilation:
ANSYS, Inc., USA
Pages:
380 - 383
Keywords:
MEMS, finite elements, transducer, reduced order modeling
Abstract:
The paper introduces a new methodology with a distributed triangle transducer for the strongly coupled simulation of micro electro mechanical systems (MEMS) in ANSYS Finite Element (FE) program.
