MEMS Applications and Characterization

	Nanotech 2002 Vol. 1 Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems Chapter 5: MEMS Applications and Characterization
-	Development and Performance of a PVM Based Parallel Geometric Modeler for MEMS
	C. Jorgensen, D. Melander, R. Schmidt and S. Plimpton
	Sandia National Laboratories, US
-	Thermal Stability Evaluation of MEMS Microactuator for Hard Disk Drive
	M. Jianqiang, C. Shixin, L. Yi, L. Boon Buan
	Data Storage Institute, SG
-	Simulation and Realization of Free Space Optical Switch Architecture Based on MEMS Vertical Mirrors
	W.J. Wang and R.M. Lin
	Nanyang Technological, SG
-	Snap-Through Bilayer Microbeam
	A. Cabal and D.S. Ross
	Eastman Kodak Company, US
-	Analysis of the Nonlinear Behavior of a MEMS Variable Capacitor
	M. Innocent, P. Wambacq, S. Donnay, H. Tilmans, M. Engels, H. DeMan and W. Sansen
	IMEC, BE
-	Comparative Studies of Novel Capacitive Transducers with Non-Planar Diaphragms
	J. Chen, L. Liu and Z. Li
	Tsinghua University, CN
-	Flow Cell Detection with an Optical Fiber
	E. Kim, W. Kim, S-G Lee and S. Park
	Kyungpook National University, KR
-	Design of the Two-Movable Plates Type MEMS Voltage Tunable Capacitor
	Y. Kim, S-G Lee and S. Park
	Kyungpook National University, KR
-	Simulation and Measurement of Dielectric Charging in Electrostatically Actuated Capacitive Microwave Switches
	J.R. Reid
	US Air Force Research Laboratory, AFRL/SNHA, US
-	Prediction Model of Microlens Fabricated by Modified LIGA Process
	D.S. Kim, S-K Lee, S.S. Yang, T.H. Kwon and S.S. Lee
	Pohang University of Science and Technology, KR
-	Simulation of Electrical Field Induced Particle Transfer
	R. Hoffmann and G. Wachutka
	Océ Printing Systems, DE
-	Modeling and Simulation of Silicon Microsystem of Chemical Signals
	M. Daniel, M. Szermer, K. Slusarczyk and A. Napieralski
	Technical University of Lodz, PL
-	Polysilicon Prototypes for Flip-bonded Hybrid MEM-tunable Filters and VCSELs
	E.M. Ochoa, L.A. Starman_Jr., W.D. Cowan, T.R. Nelson_Jr., O. Blum Spahn and J.A. Lott
	Air Force Institute of Technology, US
-	Simulation and Validation of Bulk Micromachined 6H-SiC High-g Piezoresistive Accelerometer
	A.R. Atwell, R.S. Okojie, K.T. Kornegay, S. Roberson and A. Beliveau
	Cornell University, US
-	Implementation of a Nonlinear Control Law for the Magnetostrictive Beam Vibrations by an Amplifier of Current to Current
	G.S. Bereksi
	Center of Advanced European Studies And Research, DE
-	Simulation Based Design of O2 MEMS Sensor
	Z. Andjelic, P. Krippner and A. Vogel
	ABB Corporate Research Center, DE
-	Nonlinear Micromachined Flexure for Stiction Reduction
	D-H Shim and J-W Cho
	Samsung Advanced Institute of Technology, KR
-	Analytical Pull-in Study on Non-Deformable Electrostatic Micro Actuators
	J. Zhe, X. Wu, J. Cheng, J. Wang, K.R. Farmer, L. Frechette and V. Modi
	Columbia University, US
-	Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter for Space Applications
	J.P. Loughlin, R.K. Fettig, S.H. Moseley, A.S. Kutyrev and D.B. Mott
	NASA/Goddard Space Flight Center, US
-	Concept of an Intelligent Microsystem Structure for Communication with Real Surrounding Space
	M. Husak and J. Jakovenko
	Czech Technical University, CZ
-	Analytical and FEM Simulation Pull-in Study on Deformable Electrostatic Micro Actuators
	J. Cheng, J. Zhe, X. Wu, K.R. Farmer, V. Modi and L. Frechette
	Columbia University, US
-	Modeling of a Self-Retracting Fully-Compliant Bistable Micromechanism
	N. Masters and L.L. Howell
	Georgia Institute of Technology, US
-	Simulation and Modeling of a Micro Pressure Sensor Array
	J. Jin and Z. Zhou
	Georgia Institute of Technology, US
-	RF Measurement Techniques for Micro-Cantilever Characterization and Application
	C-H Wang and R.J. Weber
	Iowa State University, US
-	Residual Stress Characterization in MEMS Microbridges using Micro-Raman Spectroscopy
	L.A. Starman_Jr., E.M. Ochoa, J.A. Lott, M.S. Amer, W.D. Cowan and J.D. Busbee
	Air Force Institute of Technology, US
-	Magnetohydrodynamic Micromixing
	J.P. Gleeson and J. West
	University College Cork, IR
-	A Study of the Behaviour of Magnetic Microactuators
	M. Flynn and J.P. Gleeson
	University College Cork, IR
-	Modeling Sub-Continuum Effects on the Mechanical Properties of Ultrathin Macromolecular Layers
	W.P. King and K.E. Goodson
	Stanford University, US
-	Capillary Interaction Between a Small Thin Solid Plate and a Liquid
	M. Taher and T. Saif
	University of Illinois Urbana-Champaign, US
-	Modeling a Growth Instability in Stressed and Ion-Implanted Doped Silicon
	A-V Phan, T. Kaplan, L.J. Gray, W. Barvosa-Carter and M.J. Aziz
	Oak Ridge National Laboratory, US
ISBN:	0-9708275-7-1
Pages:	764
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