 | Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Chapter 5: MEMS Applications and Characterization |
| - | Development and Performance of a PVM Based Parallel Geometric Modeler for MEMS |
| | C. Jorgensen, D. Melander, R. Schmidt and S. Plimpton |
| | Sandia National Laboratories, USA |
| - | Thermal Stability Evaluation of MEMS Microactuator for Hard Disk Drive |
| | M. Jianqiang, C. Shixin, L. Yi, L. Boon Buan |
| | Data Storage Institute, Singapore |
| - | Simulation and Realization of Free Space Optical Switch Architecture Based on MEMS Vertical Mirrors |
| | W.J. Wang and R.M. Lin |
| | Nanyang Technological, Singapore |
| - | Snap-Through Bilayer Microbeam |
| | A. Cabal and D.S. Ross |
| | Eastman Kodak Company, USA |
| - | Analysis of the Nonlinear Behavior of a MEMS Variable Capacitor |
| | M. Innocent, P. Wambacq, S. Donnay, H. Tilmans, M. Engels, H. DeMan and W. Sansen |
| | IMEC, Belgium |
| - | Comparative Studies of Novel Capacitive Transducers with Non-Planar Diaphragms |
| | J. Chen, L. Liu and Z. Li |
| | Tsinghua University, China |
| - | Flow Cell Detection with an Optical Fiber |
| | E. Kim, W. Kim, S-G Lee and S. Park |
| | Kyungpook National University, Korea |
| - | Design of the Two-Movable Plates Type MEMS Voltage Tunable Capacitor |
| | Y. Kim, S-G Lee and S. Park |
| | Kyungpook National University, Korea |
| - | Simulation and Measurement of Dielectric Charging in Electrostatically Actuated Capacitive Microwave Switches |
| | J.R. Reid |
| | US Air Force Research Laboratory, AFRL/SNHA, USA |
| - | Prediction Model of Microlens Fabricated by Modified LIGA Process |
| | D.S. Kim, S-K Lee, S.S. Yang, T.H. Kwon and S.S. Lee |
| | Pohang University of Science and Technology,, Korea |
| - | Simulation of Electrical Field Induced Particle Transfer |
| | R. Hoffmann and G. Wachutka |
| | Océ Printing Systems, Germany |
| - | Modeling and Simulation of Silicon Microsystem of Chemical Signals |
| | M. Daniel, M. Szermer, K. Slusarczyk and A. Napieralski |
| | Technical University of Lodz, Poland |
| - | Polysilicon Prototypes for Flip-bonded Hybrid MEM-tunable Filters and VCSELs |
| | E.M. Ochoa, L.A. Starman_Jr., W.D. Cowan, T.R. Nelson_Jr., O. Blum Spahn and J.A. Lott |
| | Air Force Institute of Technology, USA |
| - | Simulation and Validation of Bulk Micromachined 6H-SiC High-g Piezoresistive Accelerometer |
| | A.R. Atwell, R.S. Okojie, K.T. Kornegay, S. Roberson and A. Beliveau |
| | Cornell University, USA |
| - | Implementation of a Nonlinear Control Law for the Magnetostrictive Beam Vibrations by an Amplifier of Current to Current |
| | G.S. Bereksi |
| | Center of Advanced European Studies And Research, Germany |
| - | Simulation Based Design of O2 MEMS Sensor |
| | Z. Andjelic, P. Krippner and A. Vogel |
| | ABB Corporate Research Center, Germany |
| - | Nonlinear Micromachined Flexure for Stiction Reduction |
| | D-H Shim and J-W Cho |
| | Samsung Advanced Institute of Technology, Korea |
| - | Analytical Pull-in Study on Non-Deformable Electrostatic Micro Actuators |
| | J. Zhe, X. Wu, J. Cheng, J. Wang, K.R. Farmer, L. Frechette and V. Modi |
| | Columbia University, USA |
| - | Structural Analysis of a Magnetically Actuated Silicon Nitride Micro-Shutter for Space Applications |
| | J.P. Loughlin, R.K. Fettig, S.H. Moseley, A.S. Kutyrev and D.B. Mott |
| | NASA/Goddard Space Flight Center, USA |
| - | Concept of an Intelligent Microsystem Structure for Communication with Real Surrounding Space |
| | M. Husak and J. Jakovenko |
| | Czech Technical University, Czech Republic |
| - | Analytical and FEM Simulation Pull-in Study on Deformable Electrostatic Micro Actuators |
| | J. Cheng, J. Zhe, X. Wu, K.R. Farmer, V. Modi and L. Frechette |
| | Columbia University, USA |
| - | Modeling of a Self-Retracting Fully-Compliant Bistable Micromechanism |
| | N. Masters and L.L. Howell |
| | Georgia Institute of Technology, USA |
| - | Simulation and Modeling of a Micro Pressure Sensor Array |
| | J. Jin and Z. Zhou |
| | Georgia Institute of Technology, USA |
| - | RF Measurement Techniques for Micro-Cantilever Characterization and Application |
| | C-H Wang and R.J. Weber |
| | Iowa State University, USA |
| - | Residual Stress Characterization in MEMS Microbridges using Micro-Raman Spectroscopy |
| | L.A. Starman_Jr., E.M. Ochoa, J.A. Lott, M.S. Amer, W.D. Cowan and J.D. Busbee |
| | Air Force Institute of Technology, USA |
| - | Magnetohydrodynamic Micromixing |
| | J.P. Gleeson and J. West |
| | University College Cork, Ireland |
| - | A Study of the Behaviour of Magnetic Microactuators |
| | M. Flynn and J.P. Gleeson |
| | University College Cork, Ireland |
| - | Modeling Sub-Continuum Effects on the Mechanical Properties of Ultrathin Macromolecular Layers |
| | W.P. King and K.E. Goodson |
| | Stanford University, USA |
| - | Capillary Interaction Between a Small Thin Solid Plate and a Liquid |
| | M. Taher and T. Saif |
| | University of Illinois Urbana-Champaign, USA |
| - | Modeling a Growth Instability in Stressed and Ion-Implanted Doped Silicon |
| | A-V Phan, T. Kaplan, L.J. Gray, W. Barvosa-Carter and M.J. Aziz |
| | Oak Ridge National Laboratory, USA |
| ISBN: | 0-9708275-7-1 |
| Pages: | 764 |
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