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 | Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Chapter 3: System Level Modeling of MEMS |
| | Micromechanical Pierce Oscillator for Resonant Sensing Applications | | Authors: | A.A. Seshia, W. Low, S.A. Bhave, R.T. Howe and S. Montague | | Affilation: | University of California, USA | | Pages: | 162 - 165 | | Keywords: | micromechanical oscillator, resonator, resonant sensing, Pierce circuit | | Abstract: | We present the design techniques and experimental characterization of a Pierce oscillator circuit adapted for micromechanical elements with resonant frequencies lying between 100 and 300 kHz. Micromechanical double-ended tuning fork resonators serve as the crystal element of the oscillator. The measured phase noise of these oscillators lies below -100 dBc/Hz at a frequency offset of 500 Hz away from the carrier with in-circuit quality factors exceeding 30000. This noise figure improves upon previous reported values and demonstrates the feasibility of a Pierce oscillator for micromechanical vibrating elements with resonant frequencies lying under 1 MHz. The value of the second harmonic distortion factor (HD2) is -44 dB for an output amplitude of 50 mV. |  | View paper | | ISBN: | 0-9708275-7-1 |
| Pages: | 764 |
| Hardcopy: | $100.00 |
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