 | Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Chapter 3: System Level Modeling of MEMS |
| - | Modeling, Simulation and Design of Piezoelectric Micro-Hydraulic Transducer Devices |
| | O. Yaglioglu, Y.H. Su, D.C. Roberts, J. Carretero and N.W. Hagood |
| | Massachusetts Institute of Technology, US |
| - | Physically-Based Damping Model for Highly Perforated and Largely Deflected Torsional Actuators |
| | R. Sattler, G. Schrag and G. Wachutka |
| | Munich University of Technology, DE |
| - | Improving Trajectory Piecewise-Linear Approach to Nonlinear Model Order Reduction for Microm䁡chined Devices Using an Aggregated Projection Basis |
| | M. Rewienski and J.K. White |
| | Massachusetts Institute of Technology, US |
| - | Integrated Modeling of Optical MEMS Subsystems |
| | R. Stoll, T. Plowman, D. Winick and A. Morris |
| | Coventor, US |
| - | Large-Deflection Beam Model for Schematic-Based Behavioral Simulation in NODAS |
| | Q. Jing, T. Mukherjee and G.K. Fedder |
| | Carnegie Mellon University, US |
| - | Integrated Hierarchical Design of Microelectrofluidic Systems using SystemC |
| | T. Zhang, K. Chakrabarty and R.B. Fair |
| | Cadence Design Systems, Inc., US |
| - | Behavioral Modeling of a Humidity Sensor Using an Analog Hardware Description Language |
| | A. Tételin, H. Lévi, B. Mongellaz and C. Pellet |
| | Laboratoire IXL, FR |
| - | Nonlinear Analytical Reduced-Order Models for MEMS |
| | E.R. Westby and T.A. Fjeldly |
| | Norwegian University of Science and Technology, NO |
| - | Noise Considerations for Closed Loop Digital Accelerometers |
| | E. Gaura and M. Kraft |
| | Coventry University, UK |
| - | Coupled-Energy-Domain Macromodeling of MEMS Devices |
| | G. Casinovi |
| | Georgia Institute of Technology, US |
| - | Micromechanical Pierce Oscillator for Resonant Sensing Applications |
| | A.A. Seshia, W. Low, S.A. Bhave, R.T. Howe and S. Montague |
| | University of California, US |
| - | Static Equivalent Circuit Model for a Capacitive MEMS RF Switch |
| | T. Tinttunen, T. Veijola, H. Nieminen, V. Ermolov and T. Ryhanen |
| | Helsinki University of Technology, FI |
| - | Simulation of a Micro Dispenser Using Lumped Models |
| | P. Koltay, C. Moosmann, C. Litterst, W. Streule and R. Zengerle |
| | University of Freiburg, DE |
| - | Scaling Behavior of Pressure-Driven Micro-Hydraulic Systems |
| | N.R. Tas, T.S.J. Lammerink, J.W. Berenschot, M.C. Elwenspoek and A. van den Berg |
| | University of Twente, LN |
| - | Macromodel Extraction of Gas Damping Effects for Perforated Surfaces with Arbitrarily-Shaped Geometries |
| | Y-J Yang and C-J Yu |
| | National Taiwan University, TW |
| - | Dispersion Modeling in Microfluidic Channels for System-level Optimization |
| | B. Baidya, T. Mukherjee and J.F. Hoburg |
| | Carnegie Mellon University, US |
| - | Simulation of Manufacturing Variations in a Z-axis CMOS-MEMS Gyroscope |
| | S. Iyer and T. Mukherjee |
| | Carnegie Mellon University, US |
| - | Time-Domain Reduced-Order Models of Lateral Viscous Damping Effects for 3-D Geometries |
| | P-C Yen and Y-J Yang |
| | National Taiwan University, TW |
| ISBN: | 0-9708275-7-1 |
| Pages: | 764 |
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