Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems

Compact Modeling Chapter 13

The Role of TCAD in Compact Modeling

Authors: M. Duane

Affilation: Applied Materials, United States

Pages: 719 - 721

Keywords: TCAD, compact modeling, semiconductor, simulation

Abstract:
This paper is an introduction to semiconductor process and device simulation and its role in compact modeling for circuit simulation. A brief history of TCAD is given. One use of TCAD is in the generation of compact models for circuit simulation. TCAD also has an emerging role in the development of the compact models themselves. Examples of TCAD being used for both these applications are presented.


ISBN: 0-9708275-7-1
Pages: 764

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