Authors: M. Duane
Affilation: Applied Materials, United States
Pages: 719 - 721
Keywords: TCAD, compact modeling, semiconductor, simulation
This paper is an introduction to semiconductor process and device simulation and its role in compact modeling for circuit simulation. A brief history of TCAD is given. One use of TCAD is in the generation of compact models for circuit simulation. TCAD also has an emerging role in the development of the compact models themselves. Examples of TCAD being used for both these applications are presented.