Nano Science and Technology Institute
Nanotech 2002 Vol. 1
Nanotech 2002 Vol. 1
Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Chapter 13: Compact Modeling

The Role of TCAD in Compact Modeling

Authors:M. Duane
Affilation:Applied Materials, US
Pages:719 - 721
Keywords:TCAD, compact modeling, semiconductor, simulation
Abstract:This paper is an introduction to semiconductor process and device simulation and its role in compact modeling for circuit simulation. A brief history of TCAD is given. One use of TCAD is in the generation of compact models for circuit simulation. TCAD also has an emerging role in the development of the compact models themselves. Examples of TCAD being used for both these applications are presented.
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