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 | Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 8: Characterizaton, Parameter Extraction, Calibration |
| | Stress Measurement in MEMS Devices | | Authors: | L. Starman Jr., J. Busbee, J. Reber, J. Lott, W. Cowan and N. Vandelli | | Affilation: | Wright-Patterson AFB, U.S.A. | | Pages: | 398 - 401 | | Keywords: | MEMS, Raman spectroscopy, residual stress, MUMPs, Young's modulus | | Abstract: | Due to the unique structure and small scale of Micro-Electro-Mechanical Systems (MEMS), residual stresses during the deposition processes can have a profound affect on the functionality of the MEMS structures. Typically, material properties of thin films |  | View paper | | ISBN: | 0-9708275-0-4 |
| Pages: | 638 |
| Hardcopy: | $100.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
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