Starman Jr. L., Busbee J., Reber J., Lott J., Cowan W., Vandelli N.
Wright-Patterson AFB, US
Keywords: MEMS, MUMPs, Raman spectroscopy, residual stress, Young's modulus
Due to the unique structure and small scale of Micro-Electro-Mechanical Systems (MEMS), residual stresses during the deposition processes can have a profound affect on the functionality of the MEMS structures. Typically, material properties of thin films
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 398 - 401
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9708275-0-4