Nano Science and Technology Institute
Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Chapter 8:

Characterizaton, Parameter Extraction, Calibration

-Predictive and Calibrated Simulation of Doping Profiles: Low Energy As, B and BF2 Ion Implantation
 P. Scheiblin, F. Roger, D. Poncet, C. Laviron, P. Holliger, F. Laugier, E. Guichard and J.P. Caire
 LETI, FR
-Three-Dimensional Effects Obtained from Capacitance Analysis of an SRAM Cell
 Y. Takemura, K. Osada, M. Yagyu, K. Yamaguchi, J. Ushio and T. Maruizumi
 Hitachi Ltd., JP
-Stress Measurement in MEMS Devices
 L. Starman Jr., J. Busbee, J. Reber, J. Lott, W. Cowan and N. Vandelli
 Wright-Patterson AFB, US
-3-D Computational Modeling of RF MEMS Switches
 H.D. Espinosa, M. Fischer, Y. Zhu and S. Lee
 Northwestern University, US
-Parameter Extraction for Surface Micromachining Using Eelectrical Characterization of Sensors
 M. Maute, S. Kimmerle, J. Franz, J. Hauer, D. Schubert, H.-R. Krauss and D.P. Kern
 Robert Bosch GmbH, DE
-Mechanical Property Measurement of Thin-film Gold Using Thermally Actuated Bimetallic Cantilever Beams
 V.K. Pamula, A. Jog and R.B. Fair
 Duke University, US
-Direct Write Technology as a Tool to Rapidly Prototype Patterns of Biological and Electronic Systems
 B.R. Ringeisen, D.B. Chrisey, A. Piqué, D. Krizman, M. Brooks and B. Spargo
 Naval Research Laboratory, US
-Physical Modeling of MEMS Cantilever Beams and the Measurement of Stiction Force
 T. Lam and R.B. Darling
 University of Washington, US
ISBN:0-9708275-0-4
Pages:638
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