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 | Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 7: Applications: MEMS, Sensors |
| | Nonlinear Mechanics of Suspension Beams for a Micromachined Gyroscope | | Authors: | W.O. Davis and A.P. Pisano | | Affilation: | University of California, Berkeley, U.S.A. | | Pages: | 270 - 273 | | Keywords: | MEMS, gyroscope, nonlinear, suspension | | Abstract: | We present a method for the calculation of the coefficients of cubic stiffening for tether-suspended micromachined systems. The analysis is based on a nonlinear rod theory, and enables the prediction of the maximum achievable motion amplitude prior to the onset of nonlinear behavior. The analysis is applied in detail to a microgyroscope. Comparisons with a finite element model and experimental data are used to validate the analysis, and issues pertaining to the optimal design of the gyroscope's suspension are investigated. |  | View paper | | ISBN: | 0-9708275-0-4 |
| Pages: | 638 |
| Hardcopy: | $100.00 |
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