Eigenvalue Analysis of Tunable Micro-mechanical Actuator
Authors:
W-S. Lee, K-C. Kwon, B-K. Kim, J-H. Cho and S-K. Youn
Affilation:
KAIST, Korea
Pages:
378 - 381
Keywords:
electrostatic, frequency shifting, numerical method, coupled analysis
Abstract:
An eigenvalue analysis of a tunable micro-mechanical actuator is presented. The actuator is modeled as a continuum structure. The eigenvalue modified by the tuning voltage is computed through the linearization of the relation between the electrostatic for
