 | Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 7: Applications: MEMS, Sensors |
| | Thermal Modeling of a Surface-micromachined Linear Thermomechanical Actuator |
| Authors: | C.D. Lott, T.W. McLain, J.N. Harb and L.L. Howell |
| Affilation: | Brigham Young University, Germany |
| Pages: | 370 - 373 |
| Keywords: | microactuator, thermomechanical actuator |
| Abstract: | The thermal behavior of a thermomechanical in-plane microactuator is modeled using a finite-difference approach. Steady-state temperature profiles from the model are presented for a microactuator operating in air and a vacuum. The model is validated by comparing the actuator displacements predicted by the model with those obtained experimentally. Initial results demonstrate significant improvements in the steady-state efficiency of the microactuator when it is operated in a vacuum. |
 | View paper |
| ISBN: | 0-9708275-0-4 |
| Pages: | 638 |
| Hardcopy: | $100.00 |
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