Modeling and Simulation of a Single Crystal Silicon Microactuator for Hard Disk Drives
Authors:
M. Jianqiang, C. Shixin and L. Yi
Affilation:
Data Storage Institute, Singapore
Pages:
350 - 353
Keywords:
single crystal silicon, microactuator, simulation, hard disk drive
Abstract:
The modeling and simulation of a single crystal silicon microactuator for high-density hard disk drives are described in this paper. The microactuator is fabricated by LISA process, which has an electrically isolated structure directly from a single cryst
