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 | Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 7: Applications: MEMS, Sensors |
| | Electromechanical and Microwave S-parameter Properties of a Wide Tuning Range MEMS Tunable Capacitor | | Authors: | J. Chen, J. Zou, C. Liu and S-M. Kang | | Affilation: | University of Illinois, China | | Pages: | 318 - 321 | | Keywords: | tunable capacitor, simulation, S-parameter, dynamic | | Abstract: | We present the electromechanical and microwave properties of a novel micromachined parallel-plate tunable capacitor with a wide tuning range. Different from conventional two-parallel-plate tunable capacitors, this novel tunable capacitor consists of one suspended top plate and two fixed bottom plates. One of the two fixed plates and the top plate form a variable capacitor, whereas the other fixed plate and the top plate are used to provide electrostatic actuation for capacitance tuning. For the fabricated prototype tunable capacitors, a maximum tuning range of 69.8% has been achieved experimentally, exceeding the theoretical tuning range limit (50%) of conventional two-parallel-plate tunable capacitors. This novel tunable capacitor also exhibits very low return loss (< 0.6dB between 45 MHz and 10GHz). |  | View paper | | ISBN: | 0-9708275-0-4 |
| Pages: | 638 |
| Hardcopy: | $100.00 |
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