| |
 | Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 5: Optimization |
| | Statistical Optimal Design of Microelectromechanical Systems (MEMS) | | Authors: | H. Ren, A. Jog and R.B Fair | | Affilation: | Duke University, U.S.A. | | Pages: | 169 - 172 | | Keywords: | microelectromechanical system (MEMS), statistical MEMS design, yield optimization, MEMS reliability, robust design, Taguchi method | | Abstract: | A three-step technique for MEMS quality optimization is demonstrated. It exploits the relative merits of its constituent optimization components. Analog Devices' ADXL50 accelerometer was the test device with microstructure dimen-sions serving as design parameters. Manufacturing design rules [7] and sensor performance requirements served as design constraints. A static model relating input acceleration to sensed voltage was used, neglecting sensor and signal con-ditioning dynamics. The trimming yield of the ADXL50, with sensitivity as the design target, was improved by 37%. We show that the three-step method enables the search for an optimal design in a semi-automatic manner by facilitating user interaction. Our final goal is to enable the generation of MEMS mask layout while ensuring robust designs with minimum sensitivity to fabrication process variations. |  | View paper | | ISBN: | 0-9708275-0-4 |
| Pages: | 638 |
| Hardcopy: | $100.00 |
| Special: | 3 CD Set — 15% off with Free Shipping |
| Up | |
|
| nanoPRwire™ |
 |
| News Headlines |
 |
|
|
| |
| |
|
| | |
| |
|
|
