J. Lienemann, A. Greiner, J.G. Korvink and O. Sigmund
Affilation:
Albert Ludwig University, Germany
Pages:
120 - 123
Keywords:
topology optimization, Integrated magnetic field sensor, Hall plate, offset, sensitivity
Abstract:
We present an optimization strategy for the offset reduction of integrated magnetic field sensors with simultaneous maximization of sensitivity. We use the topology optimization method to automatically find a design with maximal sensitivity for given constraints on the offset by changing the conductivity of the Hall plate locally.
