 | Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Chapter 4: System Level Modeling |
| | Squeeze Film Damping in Arbitrary Shaped Microdevices Modelled by an Accurate Mixed Level Scheme |
| Authors: | G. Schrag, P. Voigt and G. Wachutka |
| Affilation: | Munich University of Technology, Germany |
| Pages: | 92 - 95 |
| Keywords: | squeeze film damping effects, mixed level simulation, compact modeling, non-trivial geometries |
| Abstract: | We propose a mixed level simulation scheme for squeeze film damping (SQFD) effects in microdevices, which allows for including the damping effects in system-level models of entire microsystems in a natural physical-based way. It also provides very large flexibility with respect to device geometry and the constituent components of a microsystem. The proposed damping model is realized in VHDL-AMS and can be easily included in system level models for full system simulation. The method has been successfully demonstrated for ele-mentary micromechanical structures. The results from the mixed level simulation approach conform very well with 3D-Navier-Stokes-based FEM simulations showing the applicability of our methodology. |
 | View paper |
| ISBN: | 0-9708275-0-4 |
| Pages: | 638 |
| Hardcopy: | $100.00 |
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