A 2D Visualization Tool for SUMMiT V Designs

	Nanotech 2001 Vol. 1 Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems Chapter 12: Software Tools, CAD Systems
	A 2D Visualization Tool for SUMMiT V Designs
Authors:	V.R. Yarberry and C.R. Jorgensen
Affilation:	Sandia National Laboratories, U.S.A.
Pages:	606 - 609
Keywords:	MEMS, SUMMiT, cross-section, process simulation
Abstract:	This paper describes the 2D Process Visualizer, a CAD tool that enables a SUMMiT (Sandia Ultra-Planar Multilevel MEMS Technology) MEMS designer to visualize the results of applying the process sequence to a mask set by generating accurate 2D cross-section
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ISBN:	0-9708275-0-4
Pages:	638
Hardcopy:	$100.00
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